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ISP-90/250C/500C/1000
Scroll vacuum pumps |
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Features for Oil-free scroll vacuum pump |
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As ISP
dry scroll vacuum pumps do not contain lubricating
oil or sealing water resulting in no back-migration
of fluid, it ensures clean vacuum. |
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It is
light-weight and occupies minimum space because
of original design called double wrap scroll. |
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While
orbiting scroll makes one turn, the process of suction,
compression and exhaust proceeds continuously, resulting
in a minimum pulsation which provides less vibration
and low noise. |
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Due
to double wrap scroll design which is dynamically
stable, ISP dry scroll vacuum pumps can deal with
a wide range of applications ranging from atmospheric
pressure to the ultimate pressure. There is little
power variance between atmospheric pressure and
the ultimate pressure, which allows repeated continuous
operation between atmospheric pressure and vacuum.
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The Air
Flush device has been added as a standard feature.
Shaft seal configuration has also improved. Due
to the Air Flush and the new shaft seal system,
reliability and maintenance interval as well as
evacuating performance of water vapor and small
particles have been now remarkably improved. |
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Specifications for Vacuum pump |
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Model
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ISP-90 |
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Displacement |
L/min(50/60Hz) |
90 / 108 |
| Ultimate
pressure |
Pa |
5 |
Motor power |
kW |
0.15 |
Voltage
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V |
Single
phase |
100,115 / 200,230 |
| Three
phase |
- |
| Noise
level |
dB(A) |
52(at Air Flush 60) |
| Leak
tightness |
Pa·L/s {mbar·L/s} |
1x10-2{1x10-4} |
| Weight |
kg |
Single phase |
14 |
| Three phase |
- |
Water
vapor
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g/day |
5(at Air Flush) |
Air-flush
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L/min |
7(at Air Flush) |
Dimensions
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mm |
Single
phase |
L308×W214×H225 |
| Three
phase |
- |
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Inlet connection |
NW25 |
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Outlet connection |
NW16 |
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Cooling system |
Air cooled |
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Standard equipment |
Air Flush ,Hour counter,
Thermally protected for single phase motor |
Model
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ISP-250C |
ISP-500C |
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Displacement |
L/min(50/60Hz) |
250/300 |
500/600 |
| Ultimate
pressure |
Pa |
1.6 |
1.0 |
Motor
power
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kW |
0.4 |
0.6 |
Voltage
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V |
Single
phase |
100,115 / 200,230 |
| Three
phase |
200,208,230 / 380,415,460 |
| Noise
level |
dB(A) |
58
(at Air Flush 66) |
60
(at Air Flush 68) |
| Leak
tightness |
Pa·L/s {mbar·L/s} |
1x10-2{1x10-4} |
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Weight |
kg |
Single
phase |
25 |
44 |
| Three
phase |
23 |
38 |
Water
vapor
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g/day |
25(at Air Flush) |
Air-flush
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L/min |
10(at Air Flush) |
Dimensions
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mm |
Single
phase |
L400×W252×H336 |
L443×W328×H372
(L443×W298×H397) |
| Three
phase |
L370×W252×H336 |
L372×W328×H372
(L372×W298×H397) |
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Inlet connection |
NW25 |
NW40 |
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Outlet connection |
NW16 |
NW25 |
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Cooling system |
Air cooled |
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Standard equipment |
Air Flush ,Hour counter,
Thermally protected for single phase motor |
Model
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ISP-1000 |
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Displacement |
L/min(50/60Hz) |
1000/ 1200 |
| Ultimate
pressure |
Pa |
1 |
Motor power |
kW |
1.4 |
Voltage
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V |
Three
phase |
200, 208, 230 / 380, 415, 460 |
| Noise
level |
dB(A) |
67 |
| Weight |
kg |
60 |
Dimensions
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mm |
L467×W390×H421 |
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Inlet connection |
NW40 |
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Outlet connection |
NW40 |
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Cooling system |
Air cooled |
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Standard equipment |
Air Flush, Hour meter |
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· Ultimate pressure is measured as
total pressure.
· Noise is measured in an anechoic
room.
· Figures in parentheses are dimensions
when inlet and outlet are placed vertically.
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Applications for Scroll pump |
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Sputtering equipment,
Vacuum deposition equipment, Ion plating equipment |
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Accelerator, Synchrotron
Radiation |
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Surface
modification, Electron beam process |
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Vacuum furnace,
Heat treatment furnace |
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Gas recovery devices |
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Laboratory use |
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Vacuum equipment |
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Vacuum packaging machine |
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Leak detectors |
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Others |
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Device handling system |
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Precaution on Usage for Scroll pumps |
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Evacuating gases |
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This pumping system is
suitable for clean processes only.
Do not use explosive, flammable, toxic or corrosive
substances or substances which contain chemicals,
solvents or particles. ANEST IWATA will not perform
maintenance work on pumps which have used hazardous
substances. |
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Ambient Temperature |
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Use at ambient operation
temperature in the range of 5°C to 40°C. |
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| More
Informations |
3176,
Shinyoshida-cho, Kohoku-ku,
Yokohama
223-8501 Japan
Telephone:(81)45-591-1112
Facsimile:(81)45-593-1539
e-mail:ispinfo@anest-iwata.co.jp |
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