|
| |
Model
|
VTU-070-BH |
|
Flange size |
Inlet |
ICF114 |
| Outlet |
NW16 |
|
TMP pumping speed |
N2 |
L/s |
70 |
| H2 |
L/s |
40 |
| Ultimate
pressure |
Pa |
10-5(No
baking) |
| Noise
level |
dB(A) |
62 |
| Foreline
pump |
ISP-90 |
| Voltage |
V |
Single phase 100, 115, 200, 230 |
| Weight |
kg |
26 |
| Dimensions |
mm |
W 235×L 436×H 475 |
| Optional
parts |
Vacuum gauge (separate setting),
Manual, Auto valve |
|
| *With Auto valve, 100V or 200V single voltage type. |
Model
|
VTC-150-MV1/2 |
|
Flange size |
Inlet |
ICF152 |
| Outlet |
NW16 |
|
TMP pumping speed |
N2 |
L/s |
190 |
| H2 |
L/s |
160 |
| Ultimate
pressure |
Pa |
10-6(No
baking) |
| Noise
level |
dB(A) |
60 |
| Foreline
pump |
ISP-250C-SV |
| Voltage |
V |
Single phase 100 |
| Weight |
kg |
54 |
| Dimensions |
mm |
W 350×L 490×H 897 |
| Optional
parts |
Chamber, Vacuum gauge,
Automatic valve |
|
*If you have any preference of turbo molecular
pump, it could be chosen.
|
| |
 |
Clean Discharge and
Vacuum
This high vacuum pumping system is completely dry
system because it consists of oil-free scroll vacuum
pump (ISP) and turbo molecular pump (TMP). |
|
Compact Design
Since this pumping system is compact design and
footprint is minimized, it can be installed near
your vacuum system. It is easy to move. |
|
Handling
Its controller has two ways to start to run TMP,
manually or automatically*. It can be chosen by
the application and preference.
* In the case of automatic start, it is restricted
by volume of chamber and pipes. |
|
| |
|
Turbo Molecular Pump
If you have any preference of TMP, it could be chosen.
Ask for TMP and installation direction of TMP. |
|
Others
Ask for chamber, vacuum gauge and automatic valve
because they are optional. |
|
| |
|
Accelerator |
X-ray Fluorescence Spectroscopy |
|
Synchrotron Radiation |
SEM/TEM |
|
Leak Test |
Various Analyzers |
|
Mass Spectrometer |
Subsidiary Pumping System |
|
Surface Analyzer |
Others |
|
| |
|
Evacuating gases
Do not use explosive, flammable, toxic or corrosive
substances or substances which contain chemicals,
solvents or particles. ANEST IWATA will not perform
maintenance work on pumps which have used hazardous
substances. |
|
Ambient temperature
Ask for chamber, vacuum gauge and automatic valve
because they are optional. |
|
| More
Informations |
3176,
Shinyoshida-cho, Kohoku-ku,
Yokohama
223-8501 Japan
Telephone:(81)45-591-1112
Facsimile:(81)45-593-1539
e-mail:ispinfo@anest-iwata.co.jp |
|
Specifications
