No lubricant
oil is through gas contact parts inside the pump. This
oil-free scroll pump can evacuate from atmospheric pressure
to vacuum. It was developed in the late 80's and it is
prevailing in the semiconductor related field because
it creates clean vacuum and makes easier maintenance.
Other dry pumps include root, claw, screw and turbo type
as well as scroll type.
Principle of Oil-free Scroll Vacuum Pump
